• DocumentCode
    3252316
  • Title

    Emission stability and high current performance of diamond-coated Si emitters

  • Author

    Zhirnov, V.V. ; Voronin, A.B. ; Givargizov, E.I. ; Meshcheryakova, A.L.

  • Author_Institution
    Inst. of Crystallogr., Acad. of Sci., Moscow, Russia
  • fYear
    1995
  • fDate
    July 30 1995-Aug. 3 1995
  • Firstpage
    340
  • Lastpage
    344
  • Abstract
    Silicon field emitters were coated with polycrystalline diamond using hot-filament CVD technique. Maximum emission currents of 300-500 /spl mu/A were achieved from single-tip emitters. Current fluctuations have been found to be between 3 and 16%. Temporal dependence of emission current was studied during 36 h at initial current of 100 /spl mu/A. At the end of the testing 20%-decrease of the current took place. Diamond coated silicon emitters demonstrated favourable emission properties, as compared with uncoated silicon emitters.
  • Keywords
    CVD coatings; current fluctuations; diamond; electron field emission; silicon; 100 to 500 muA; Si-C; current fluctuations; emission stability; hot-filament CVD; polycrystalline diamond coating; silicon field emitter; single-tip emitter; Coatings; Conductivity; Crystallography; Electric breakdown; Flat panel displays; Prototypes; Silicon; Stability; Testing; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
  • Conference_Location
    Portland, OR, USA
  • Print_ISBN
    0-7803-2143-X
  • Type

    conf

  • DOI
    10.1109/IVMC.1995.487062
  • Filename
    487062