Title :
Work function measurements of diamond film surfaces
Author :
Mackie, W.A. ; Bell, A.E.
Author_Institution :
Linfield Res. Inst., McMinnville, OR, USA
fDate :
July 30 1995-Aug. 3 1995
Abstract :
We report on the growth and subsequent work function measurement of diamond film covered surfaces. Diamond films were grown via a thermal CVD technique. Two feed gas mixtures were used, 1% CH/sub 4//99% H/sub 2/ and 1% CH/sub 4//100 ppm HN/sub 3///spl sim/99% H/sub 2/. Raman spectroscopy was used to verify diamond growth. Electron emission was investigated and work function values obtained in the thermionic emission as well as field emission modes. However, we report mainly on a unique way to ascertain the absolute work function of diamond surfaces using the field emission retarding potential (FERP) technique. This experimental method readily lends itself to these types of investigations where values can be determined apart from thermal or field effects.
Keywords :
CVD coatings; diamond; electron field emission; thermionic electron emission; work function; C; Raman spectroscopy; diamond film surfaces; electron emission; field emission; field emission retarding potential; growth; thermal CVD; thermionic emission; work function; Doping; Electron emission; Feeds; Hydrogen; Nitrogen; Raman scattering; Spectroscopy; Substrates; Thermionic emission; Tungsten;
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
DOI :
10.1109/IVMC.1995.487064