DocumentCode
3252357
Title
Work function measurements of diamond film surfaces
Author
Mackie, W.A. ; Bell, A.E.
Author_Institution
Linfield Res. Inst., McMinnville, OR, USA
fYear
1995
fDate
July 30 1995-Aug. 3 1995
Firstpage
350
Lastpage
354
Abstract
We report on the growth and subsequent work function measurement of diamond film covered surfaces. Diamond films were grown via a thermal CVD technique. Two feed gas mixtures were used, 1% CH/sub 4//99% H/sub 2/ and 1% CH/sub 4//100 ppm HN/sub 3///spl sim/99% H/sub 2/. Raman spectroscopy was used to verify diamond growth. Electron emission was investigated and work function values obtained in the thermionic emission as well as field emission modes. However, we report mainly on a unique way to ascertain the absolute work function of diamond surfaces using the field emission retarding potential (FERP) technique. This experimental method readily lends itself to these types of investigations where values can be determined apart from thermal or field effects.
Keywords
CVD coatings; diamond; electron field emission; thermionic electron emission; work function; C; Raman spectroscopy; diamond film surfaces; electron emission; field emission; field emission retarding potential; growth; thermal CVD; thermionic emission; work function; Doping; Electron emission; Feeds; Hydrogen; Nitrogen; Raman scattering; Spectroscopy; Substrates; Thermionic emission; Tungsten;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location
Portland, OR, USA
Print_ISBN
0-7803-2143-X
Type
conf
DOI
10.1109/IVMC.1995.487064
Filename
487064
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