Title :
Microrelay matrices based on electrostatic operation principle
Author :
Grigoriscin, I.L. ; Mukhurov, N.I.
Author_Institution :
Inst. of Electron., Acad. of Sci., Minsk, Byelorussia
fDate :
July 30 1995-Aug. 3 1995
Abstract :
Amorphous alumina prepared by anodic oxidation of aluminium is an excellent elastic material. This fact in conjunction with methods of formation of free-standing anodic alumina structures with controlled physicomechanical properties make it possible to develop microcommutation devices (microrelays) based on the electrostatic operation principle. The microrelay matrix proposed in this paper comprises three identical independent microcommutation devices formed on two alumina substrates.
Keywords :
alumina; amorphous state; anodised layers; commutation; electrostatic devices; micromechanical devices; relays; Al/sub 2/O/sub 3/; amorphous alumina substrate; anodic oxidation; elastic material; electrostatic operation; free-standing structure; microcommutation device; microrelay matrix; Conducting materials; Electrostatics; Immune system; Materials science and technology; Microrelays; Semiconductivity; Semiconductor materials; Substrates; Switching circuits; Voltage control;
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
DOI :
10.1109/IVMC.1995.487073
