Title :
Field emission from ZrC films on single emitters and emitter arrays
Author :
Tianbao Xie ; Mackie, W.A. ; Davis, P.R.
Author_Institution :
Linfield Res. Inst., McMinnville, OR, USA
fDate :
July 30 1995-Aug. 3 1995
Abstract :
Field emission from ZrC films deposited on W, Si and Mo single emitters and field emitter arrays (FEAs) made of Mo and Si have been studied. The results shows dramatic improvements in emitter performance by reducing work function (on the order of 1 eV) and increasing stability.
Keywords :
electron field emission; molybdenum; silicon; tungsten; vacuum microelectronics; work function; zirconium compounds; FEAs; ZrC-Mo; ZrC-Si; ZrC-W; electron field emission; emitter performance; field emitter arrays; single emitters; stability; work function; Atherosclerosis; Crystals; Etching; Field emitter arrays; Semiconductor films; Stability; Testing; Voltage; Wire; Zirconium;
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
DOI :
10.1109/IVMC.1995.487076
