• DocumentCode
    3252733
  • Title

    A Nanoscale bSPIFET to Overcome CMOS Scaling

  • Author

    Lin, Jyi-Tsong ; Eng, Yi-Chuen ; Lee, Tai-Yi ; Lin, Kao-Cheng

  • Author_Institution
    Dept. of Electr. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung
  • fYear
    2006
  • fDate
    2-5 Oct. 2006
  • Firstpage
    85
  • Lastpage
    87
  • Abstract
    In this paper, we are working on a probe into the effects of gate length (Lg) variation upon the nanoscale silicon on partial insulator field-effect transistor with block oxide (bSPIFET) being use for deca-nanometer age
  • Keywords
    CMOS integrated circuits; field effect transistors; semiconductor device manufacture; silicon-on-insulator; CMOS scaling; Si; deca nanometer; gate length variation; nanoscale bSPIFET; nanoscale silicon partial insulator field effect transistor with block oxide; Conference proceedings; Doping; Etching; FETs; Immune system; Insulation; Nanoscale devices; Probes; Silicon on insulator technology; Sun;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    International SOI Conference, 2006 IEEE
  • Conference_Location
    Niagara Falls, NY
  • ISSN
    1078-621X
  • Print_ISBN
    1-4244-0289-1
  • Electronic_ISBN
    1078-621X
  • Type

    conf

  • DOI
    10.1109/SOI.2006.284445
  • Filename
    4062893