Title :
XPS and LEED studies of ZrO/W(100) surface
Author :
Satoh, H. ; Nakane, H. ; Adachi, H.
Author_Institution :
Dept. of Electr. & Electron. Eng., Muroran Inst. of Technol., Japan
fDate :
July 30 1995-Aug. 3 1995
Abstract :
The authors present information on the ZrO/W(100) surface and investigate a relation between the chemical composition and surface structure. For this purpose, X-ray photoelectron spectroscopy (XPS) and low energy electron diffraction (LEED) were adopted. It is known that XPS is very useful technique to identify chemical composition on a surface. By a combination of XPS and LEED observation, it is expected that the behavior of Zr on the ZrO/W(100) will be clarified.
Keywords :
X-ray photoelectron spectra; low energy electron diffraction; stoichiometry; surface structure; thermionic electron emission; tungsten; work function; zirconium compounds; LEED; W; X-ray photoelectron spectroscopy; XPS; ZrO-W; ZrO/W(100) surface; chemical composition; low energy electron diffraction; surface structure; Chemicals; Electron optics; Heating; Optical pumping; Spectroscopy; Surface treatment; Temperature; Tungsten; Wire; Zirconium;
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
DOI :
10.1109/IVMC.1995.487081
