DocumentCode :
3252898
Title :
Point ion sources of Pt and Ir
Author :
Golubev, O.L. ; Kontorovich, E.L. ; Shrednik, V.N.
Author_Institution :
A.F. Ioffe Physicotech. Inst., Acad. of Sci., St. Petersburg, Russia
fYear :
1995
fDate :
July 30 1995-Aug. 3 1995
Firstpage :
447
Lastpage :
449
Abstract :
High temperature field evaporation was used for creation of point ion sources of Pt and Ir ions. Field ion desorption microscopy was used for visualization of ionic beams in situ. It is typical both for Ir and for Pt to form a faceted built-up form with sharp vertexes in <023> directions as a result of a certain thermo-field treatment. The ion field evaporation beams from these vertexes were narrow and intensive enough and simultaneously geometrically stable. Details of formation and emission of such vertexes as well as some other forms are discussed.
Keywords :
field evaporation; ion sources; iridium; platinum; Ir; Pt; facets; field ion desorption microscopy; high temperature field evaporation; ionic beams; point ion sources; thermo-field treatment; vertexes; Electron emission; Electron microscopy; Helium; Ion beams; Ion emission; Ion sources; Shape control; Temperature control; Temperature measurement; Visualization;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
Type :
conf
DOI :
10.1109/IVMC.1995.487086
Filename :
487086
Link To Document :
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