DocumentCode
3253008
Title
Vacuum emission of hot electrons from GaAs
Author
Fitting, H.-J. ; Hingst, T. ; Schreiber, E. ; Geib, E.
Author_Institution
Fachbereich Phys., Rostock Univ., Germany
fYear
1995
fDate
July 30 1995-Aug. 3 1995
Firstpage
468
Lastpage
472
Abstract
Intrinsic GaAs layers up to 3 /spl mu/m on highly doped n/sup ++/-substrate were covered with very thin Au-layers (10 nm) in order to manufacture planar field emission cathodes. At a tenfold Gunn-field of about 50 kV/cm we observe the beginning of hot and ballistic electron emission into vacuum. The energy analysis of them shows energy distributions over several eV exceeding for thick samples even 10 eV. We give a description of that high energy transport by means of Monte-Carlo calculations including acoustic and optical phonon interaction of electrons, intervalley scattering and impact ionization of valence band electrons. In a similar way, by means of vacuum emission experiments, EBIC and MC calculations we have evidenced high field transport in ZnS and SiO/sub 2/, too.
Keywords
III-V semiconductors; Monte Carlo methods; cathodes; electron field emission; electron-phonon interactions; gallium arsenide; hot carriers; impact ionisation; many-valley semiconductors; vacuum microelectronics; EBIC; GaAs; Gunn field; Monte-Carlo calculations; SiO/sub 2/; ZnS; acoustic phonons; ballistic electrons; high field transport; hot electrons; impact ionization; intervalley scattering; optical phonons; planar field emission cathodes; vacuum emission; valence band electrons; Acoustic emission; Acoustic scattering; Cathodes; Electron emission; Electron optics; Gallium arsenide; Manufacturing; Optical scattering; Phonons; Stimulated emission;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location
Portland, OR, USA
Print_ISBN
0-7803-2143-X
Type
conf
DOI
10.1109/IVMC.1995.487091
Filename
487091
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