Title :
Point-to-point control of a MIMO servomechanism
Author :
Roover, DickDe ; Sperling, Frank B. ; Bosgra, Okko H.
Author_Institution :
SC Solutions Inc., Santa Clara, CA, USA
Abstract :
Many modern mechanical servomechanisms require high precision point-to-point motion of a mass without residual vibration. In our previous paper (1997) we showed how residual-free motion could be accomplished for one linear motor of a high-precision servo. In this paper, we show how the theory of command shaping for residual free motions can be extended for systems with multiple inputs and outputs
Keywords :
MIMO systems; integrated circuit manufacture; linear motors; motion control; position control; servomechanisms; IC manufacture; MIMO systems; command shaping; linear motor; motion control; point-to-point control; servomechanism; transfer function; wafer positioning; Actuators; Control systems; Integrated circuit manufacture; MIMO; Position control; Semiconductor device modeling; Servomechanisms; Servomotors; Transfer functions; Vibrations;
Conference_Titel :
American Control Conference, 1998. Proceedings of the 1998
Conference_Location :
Philadelphia, PA
Print_ISBN :
0-7803-4530-4
DOI :
10.1109/ACC.1998.688329
