Investigation of electron tunnelling emitter

As one of the potential emitters applied in the vacuum microelectronics devices, in addition to the tip field emitter, electron tunnelling emitters have the advantages of being relatively easy to fabricate and capable of drawing high emission current, and having high resistance to a poor vacuum environment. The development work on MIS electron tunnelling emission arrays is involved in the fabrication of high packing density arrays and high quality electron emission cells. The article describes a Metal-Insulator-Semiconductor electron tunnelling emission array.