Title :
Emission characteristics of microminiature thermionic vacuum (MTV) diodes
Author :
Sadwick, L.P. ; Zhang, Y.Z. ; Zhang, T.H. ; Schaeffer, D.J. ; Petelenz, D. ; Hwu, R.J.
Author_Institution :
Dept. of Electr. Eng., Utah Univ., Salt Lake City, UT, USA
fDate :
July 30 1995-Aug. 3 1995
Abstract :
Summary form only given. Details of the emission characteristics of a thermionic analog to field emitter vacuum microelectronics will be presented. These microminiature thermionic vacuum (MTV) emitters are fabricated using micromachining and semiconductor manufacturing process technology and can be fabricated on any substrate. A salient feature of MTV technology is the use of a suspended filament that can be easily coupled with a low work function cathode which greatly reduces the thermal load and stress of the system.
Keywords :
diodes; thermionic electron emission; thermionic tubes; vacuum microelectronics; MTV technology; emission characteristics; fabrication; low work function cathode; micromachining; microminiature thermionic vacuum diode; semiconductor manufacturing; stress; suspended filament; thermal load; vacuum microelectronics; Cathodes; Cities and towns; Electron beams; Electron tubes; Scanning electron microscopy; Semiconductor diodes; Thermal stresses; Thermionic emission; Transmission electron microscopy; Vacuum technology;
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
DOI :
10.1109/IVMC.1995.487105
