Title :
Optimal Design of Nanoscale Triple-Gate Devices
Author :
Chiang, Meng-Hsueh ; Lin, Tze-Neng ; Kim, Keunwoo ; Chuang, Ching-Te ; Tretz, Christophe
Author_Institution :
Nat. Ilan Univ.
Abstract :
The impacts of corner rounding in TG MOSFETs on DIBL and device characteristics were analyzed via 3D numerical simulations. Properly rounded corners of TG device can improve SCEs or increase drive current. Semi-cylindrical gate structure is preferable for heavily-doped devices, while rectangular gate structure appears better for lightly-doped devices, respectively
Keywords :
MOSFET; nanoelectronics; semiconductor doping; 3D numerical simulations; TG MOSFET; heavily-doped devices; lightly-doped devices; nanoscale triple-gate devices; rectangular gate structure; semicylindrical gate structure; CMOS technology; Conference proceedings; Control systems; Doping profiles; Electrons; MOSFET circuits; Nanoscale devices; Optimal control; Silicon; USA Councils;
Conference_Titel :
International SOI Conference, 2006 IEEE
Conference_Location :
Niagara Falls, NY
Print_ISBN :
1-4244-0289-1
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2006.284476