DocumentCode
3253313
Title
An electron beam microcolumn for multi-beam applications
Author
Kratschmer, E. ; Kim, H.S. ; Thomson, M.G.R. ; Lee, K.Y. ; Rishton, S.A. ; Yu, M.L. ; Chang, T.H.P.
Author_Institution
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
fYear
1995
fDate
July 30 1995-Aug. 3 1995
Firstpage
523
Abstract
Summary form only given. Highly miniaturized electron beam columns based on a field emission source and microfabricated electron optical components have been developed. A 1 keV microcolumn operating with a miniaturized Zr/O/W Schottky emitter has been successfully evaluated for the first time. This paper will present the results obtained with the new microcolumn and discuss present efforts to further improve column performance with respect to resolution, beam current, and deflection field size.
Keywords
electron beams; electron optics; 1 keV; Zr-O-W; Zr/O/W Schottky emitter; electron beam microcolumn; electron optical components; field emission source; microfabrication; multibeam applications; Biomembranes; Electrodes; Electron beams; Electron emission; Inspection; Optical devices; System testing; Zirconium;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location
Portland, OR, USA
Print_ISBN
0-7803-2143-X
Type
conf
DOI
10.1109/IVMC.1995.487106
Filename
487106
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