DocumentCode
3253330
Title
A Bayard-Alpert vacuum gauge with microtips
Author
Baptist, R. ; Bieth, C. ; Py, C.
Author_Institution
CEA, Centre d´Etudes Nucleaires de Grenoble, France
fYear
1995
fDate
July 30 1995-Aug. 3 1995
Firstpage
524
Lastpage
528
Abstract
With the replacement of hot filaments by field-effect microtips, many problems in Bayard-Alpert gauges caused by thermionic emission like degassing, high power consumption or mechanical weakness can be overcome. The results of the experiments made by replacing the tungsten filament by an array of microtips fabricated at LETI in a classical Bayard-Alpert gauge show, not only that microtips can be a good substitute for filaments in this application, but also that they enable one to improve some characteristics, such as the sensitivity of the gauge and the width of the working scale. Moreover, some new options like fast pulsed operation or fast security cutout are possible due to the very short time needed to stabilize the electronic emission.
Keywords
ionisation gauges; vacuum microelectronics; Bayard-Alpert vacuum gauge; degassing; electronic emission; field-effect microtip array; mechanical weakness; power consumption; Cathodes; Chemicals; Electrons; Energy consumption; Gases; Geometry; Hysteresis; Ionization; Nitrogen; Pressure measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location
Portland, OR, USA
Print_ISBN
0-7803-2143-X
Type
conf
DOI
10.1109/IVMC.1995.487107
Filename
487107
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