• DocumentCode
    3253330
  • Title

    A Bayard-Alpert vacuum gauge with microtips

  • Author

    Baptist, R. ; Bieth, C. ; Py, C.

  • Author_Institution
    CEA, Centre d´Etudes Nucleaires de Grenoble, France
  • fYear
    1995
  • fDate
    July 30 1995-Aug. 3 1995
  • Firstpage
    524
  • Lastpage
    528
  • Abstract
    With the replacement of hot filaments by field-effect microtips, many problems in Bayard-Alpert gauges caused by thermionic emission like degassing, high power consumption or mechanical weakness can be overcome. The results of the experiments made by replacing the tungsten filament by an array of microtips fabricated at LETI in a classical Bayard-Alpert gauge show, not only that microtips can be a good substitute for filaments in this application, but also that they enable one to improve some characteristics, such as the sensitivity of the gauge and the width of the working scale. Moreover, some new options like fast pulsed operation or fast security cutout are possible due to the very short time needed to stabilize the electronic emission.
  • Keywords
    ionisation gauges; vacuum microelectronics; Bayard-Alpert vacuum gauge; degassing; electronic emission; field-effect microtip array; mechanical weakness; power consumption; Cathodes; Chemicals; Electrons; Energy consumption; Gases; Geometry; Hysteresis; Ionization; Nitrogen; Pressure measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
  • Conference_Location
    Portland, OR, USA
  • Print_ISBN
    0-7803-2143-X
  • Type

    conf

  • DOI
    10.1109/IVMC.1995.487107
  • Filename
    487107