Title :
Characterization of an embedded micro-heater for gas sensors applications
Author :
Baroncini, M. ; Placidi, P. ; Scorzoni, A. ; Cardinali, G.C. ; Dori, L. ; Nicoletti, S.
Author_Institution :
Dipt. d´´Ingegneria Elettronica e dell´´Inf., Perugia Univ., Italy
Abstract :
The heating characteristic of a microheater element, plated onto a thermally insulated dielectric membrane, define the sensitivity and selectivity of a micromachined gas sensor. Therefore an accurate determination of its temperature is required. In this paper, we describe a new four-point probe heating element configuration together with a simple analytical model of its thermal behavior
Keywords :
gas sensors; heating elements; microsensors; probes; semiconductor device models; semiconductor device testing; analytical model; embedded microheater element; four-point probe heating element; gas sensors; micromachined sensor; selectivity; sensitivity; thermal behavior; thermally insulated dielectric membrane; Biomembranes; Dielectrics and electrical insulation; Gas detectors; Heating; Passivation; Resistors; Substrates; Temperature measurement; Temperature sensors; Testing;
Conference_Titel :
VLSI Technology, Systems, and Applications, 2001. Proceedings of Technical Papers. 2001 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
0-7803-6412-0
DOI :
10.1109/VTSA.2001.934510
