Title :
Study of Fabricated System Based on Nanosecond Pulse Laser
Author :
Sun, Fengming ; Fu, Xing ; Zhou, Zhiyuan ; Wu, Yong ; Liu, Chunyang
Author_Institution :
State Key Lab. of Precision Meas. Technol. & Instrum., Tianjin Univ. Tianjin, Tianjin, China
Abstract :
Laser machining systems have been widely applied in micro-fabrication process development for 20 years. The current availability of nanosecond pulse UV laser sources is broadening the applications of laser micro-processing. In this work we present main features and potential applications of an integrative nanosecond pulse laser micro-machining numerical control system. Nanosecond Pulse Ultraviolet Laser (355 nm) machining is an important method for developing micro structures. According to the special need for micro-machining, we designed a NC system based on PCI bus and FPGA technologies. This system consists of a 3-D motion platform including a displacement signal feedback system with accuracy of 1 um, a CCD (Charge Coupled Device) monitor and a workstation. After briefly describing the laser machining system, some micro structures were fabricated with different laser parameters. And a morphological characteristic is evaluated by optical microscopy.
Keywords :
charge-coupled devices; laser beam machining; micromachining; optical microscopy; 3D motion platform; FPGA technologies; PCI bus; charge coupled device monitor; displacement signal feedback system; laser machining systems; microfabrication process; microstructures; nanosecond pulse UV laser sources; nanosecond pulse laser; numerical control system; optical microscopy; wavelength 355 nm; Charge coupled devices; Charge-coupled image sensors; Computer numerical control; Field programmable gate arrays; Laser applications; Laser feedback; Machining; Optical feedback; Optical microscopy; Optical pulses;
Conference_Titel :
Photonics and Optoelectronics, 2009. SOPO 2009. Symposium on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-4412-0
DOI :
10.1109/SOPO.2009.5230297
