Title :
Protein impregnated polymer film infrared sensor using suspended microelectromechanical systems pixels
Author :
Kaieda, T. ; Kladitis, P.E. ; Kading, G.A. ; Brott, L.L. ; Allen, F.D. ; Parish, J.W.
Author_Institution :
Air Force Inst. of Technol., Wright-Patterson AFB, OH
Abstract :
Large pixel areas with thick film suspensions on a solid substrate have been shown to change resistivity when measured at different substrate temperatures. Microsized pixel areas with thinner suspensions on a thermally isolating silicon micromachined structure have demonstrated the same decrease in resistivity when exposed to infrared radiation
Keywords :
infrared detectors; microsensors; polymer films; suspensions; thick films; infrared radiation; infrared sensor; microsized pixel areas; protein impregnated polymer film; solid substrate; suspended microelectromechanical systems; thick film suspensions; Area measurement; Conductivity; Infrared sensors; Microelectromechanical systems; Polymer films; Proteins; Solids; Substrates; Suspensions; Thick films;
Conference_Titel :
Circuits and Systems, 2005. 48th Midwest Symposium on
Conference_Location :
Covington, KY
Print_ISBN :
0-7803-9197-7
DOI :
10.1109/MWSCAS.2005.1594344
