Abstract :
The following topics are dealt with: nanoscience and nanoengineering; advanced microwave devices and circuits; RF MEMS and NEMS; microphotonics; microsensors; microstructures for bio and medical applications; physics of materials; advanced devices and structures; materials for semiconductor devices; modelling and simulation; integrated circuits
Keywords :
integrated circuit technology; micromechanical devices; microsensors; microwave devices; monolithic integrated circuits; nanoelectronics; semiconductor devices; semiconductor technology; NEMS; RF MEMS; biomedical applications; integrated circuits; microphotonics; microsensors; microstructures; microwave circuits; microwave devices; nanoengineering; nanoscience; semiconductor devices;
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
DOI :
10.1109/SMICND.2006.283912
