• DocumentCode
    3256364
  • Title

    A 650 V rated RESURF-type LDMOS employing an internal clamping diode for induced bulk breakdown without EPI layer

  • Author

    Kim, M.H. ; Kim, J.J. ; Choi, Y.S. ; Jeon, C.K. ; Kim, S.L. ; Kang, H.S. ; Song, C.S.

  • Author_Institution
    New Technol. Dev. Team, Fairchild Korea Semicond. Co., Puchon, South Korea
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    347
  • Lastpage
    350
  • Abstract
    A new LDMOS employing an internal clamping diode is proposed in order to prevent surface breakdown which is a weak point of RESURF Type LDMOS. The clamping diode of N+/N-/P-well/P-sub was fabricated by cutting n-well located below drain contact and inserting p-well. Breakdown stabilization was realized by inducing bulk breakdown at the clamping diode without the increase of Ron,sp (specific on resistance) when width of p-well was designed to 12 um
  • Keywords
    power MOSFET; semiconductor device breakdown; 650 V; RESURF LDMOS transistor; bulk breakdown; internal clamping diode; specific on-resistance; surface breakdown; Breakdown voltage; Clamps; Contacts; Electric breakdown; Energy consumption; Epitaxial layers; Medical simulation; Power integrated circuits; Semiconductor diodes; Surface resistance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Power Semiconductor Devices and ICs, 2001. ISPSD '01. Proceedings of the 13th International Symposium on
  • Conference_Location
    Osaka
  • ISSN
    1063-6854
  • Print_ISBN
    4-88686-056-7
  • Type

    conf

  • DOI
    10.1109/ISPSD.2001.934626
  • Filename
    934626