Title :
RF NEMS Switch Based on Carbon Nanotube Vertical Tweezers
Author :
Dragoman, M. ; Takacs, A. ; Hartnagel, H. ; Plana, R.
Author_Institution :
Nat. Res. & Dev. Inst. in Microtechnol., Bucharest
Abstract :
This paper presents the implementation of a nanoelectromechanical system (NEMS) switch based on metallic carbon nanotube (CNT) tweezers vertically positioned between the central and ground lines of a coplanar line (CPW)-the typical planar waveguide at millimeter waves. This device combines the best properties of RF MEMS switches, i.e. low losses and high isolation, with those of NEMS, i.e. very short switching time, low actuation voltage. In this respect, this RF NEMS switch displays an average insertion loss lower than 0.5 dB, an average isolation of -23 dB and a 49 ns switching time in the 10-100 GHz bandwidth
Keywords :
carbon nanotubes; coplanar waveguides; microswitches; 10 to 100 GHz; 49 ns; CNT tweezers; CPW; RF NEMS switch; coplanar line; coplanar waveguide; metallic carbon nanotube tweezers; millimeter waves; nanoelectromechanical system switch; vertical tweezers; Carbon nanotubes; Coplanar waveguides; Displays; Insertion loss; Low voltage; Nanoelectromechanical systems; Planar waveguides; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
DOI :
10.1109/SMICND.2006.283944
