RF NEMS Switch Based on Carbon Nanotube Vertical Tweezers

Author

Dragoman, M. ; Takacs, A. ; Hartnagel, H. ; Plana, R.

Author_Institution

Nat. Res. & Dev. Inst. in Microtechnol., Bucharest

Volume

1

fYear

2006

fDate

27-29 Sept. 2006

Firstpage

111

Lastpage

114

Abstract

This paper presents the implementation of a nanoelectromechanical system (NEMS) switch based on metallic carbon nanotube (CNT) tweezers vertically positioned between the central and ground lines of a coplanar line (CPW)-the typical planar waveguide at millimeter waves. This device combines the best properties of RF MEMS switches, i.e. low losses and high isolation, with those of NEMS, i.e. very short switching time, low actuation voltage. In this respect, this RF NEMS switch displays an average insertion loss lower than 0.5 dB, an average isolation of -23 dB and a 49 ns switching time in the 10-100 GHz bandwidth

Keywords

carbon nanotubes; coplanar waveguides; microswitches; 10 to 100 GHz; 49 ns; CNT tweezers; CPW; RF NEMS switch; coplanar line; coplanar waveguide; metallic carbon nanotube tweezers; millimeter waves; nanoelectromechanical system switch; vertical tweezers; Carbon nanotubes; Coplanar waveguides; Displays; Insertion loss; Low voltage; Nanoelectromechanical systems; Planar waveguides; Radio frequency; Radiofrequency microelectromechanical systems; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

International Semiconductor Conference, 2006

Conference_Location

Sinaia

Print_ISBN

1-4244-0109-7

Type

conf

DOI

10.1109/SMICND.2006.283944

Filename

4063171