Title :
Optical and Structural Properties of SnO2-Based Sol-Gel Thin Films
Author :
Anastasescu, M. ; Gartner, M. ; Mihaiu, S. ; Anastasescu, C. ; Purica, M. ; Manea, E. ; Zaharescu, M.
Author_Institution :
Inst. of Phys. Chem., "Ilie Murgulescu" of the Romanian Acad., Bucharest
Abstract :
SnO2 thin films have been deposited on glass from Sn (II)-2-ethylhexanoate precursor using the dip-coating sol-gel method. Based on spectroscopic ellipsometry (SE) measurements optical and structural properties of the SnO2 films have been obtained. It was found that the concentration of tin oxide sols used for deposition strongly influences the thickness and the optical properties of the film, such as optical constants (n and k) or optical conductivity (sigma)
Keywords :
dip coating; ellipsometry; glass; optical properties; sol-gel processing; sols; thin films; tin compounds; SE measurements; Sn (II)-2-ethylhexanoate precursor; SnO2; SnO2 thin films; dip-coating sol-gel method; optical properties; sol-gel thin films; spectroscopic ellipsometry measurements; structural properties; tin oxide sols; Conductivity; Dip coating; Glass; Optical films; Optical sensors; Semiconductor films; Sensor arrays; Sputtering; Substrates; Tin;
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
DOI :
10.1109/SMICND.2006.283958
