Title :
Novel Zinc Oxide Nanostructured thin Films for Volatile Organic Compaunds Gas Sensors
Author :
Shishiyanu, T. ; Shishiyanu, S. ; Lupan, O. ; Sontea, V. ; Bragorenco, A.
Author_Institution :
Dept. of Microelectron. & Semicond. Devices, Moldova Tech. Univ., Chisinau
Abstract :
Novel zinc oxide nanostructured thin films have been obtained by chemical deposition technique and rapid photothermal processing (RPP). ZnO nanostructures were studied for the development of volatile organic compounds (VOC) sensors. The investigations results indicate that by RPP is possible to control the sensing properties and operating temperature. A correlation taking into account the nanostructure of the material, the effects of the dopants, RPP and the response of the VOC sensor was established
Keywords :
II-VI semiconductors; chemical vapour deposition; gas sensors; nanostructured materials; photothermal spectroscopy; thin films; zinc compounds; VOC sensors; ZnO; ZnO nanostructures; chemical deposition technique; gas sensors; rapid photothermal processing; volatile organic compounds sensors; zinc oxide nanostructured thin films; Chemical processes; Chemical sensors; Gas detectors; Nanostructures; Sputtering; Temperature control; Temperature sensors; Thin film sensors; Volatile organic compounds; Zinc oxide; RPP; VOC; ZnO nanostructure; sensors;
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
DOI :
10.1109/SMICND.2006.283968
