Novel Zinc Oxide Nanostructured thin Films for Volatile Organic Compaunds Gas Sensors

Author

Shishiyanu, T. ; Shishiyanu, S. ; Lupan, O. ; Sontea, V. ; Bragorenco, A.

Author_Institution

Dept. of Microelectron. & Semicond. Devices, Moldova Tech. Univ., Chisinau

Volume

1

fYear

2006

fDate

27-29 Sept. 2006

Firstpage

201

Lastpage

204

Abstract

Novel zinc oxide nanostructured thin films have been obtained by chemical deposition technique and rapid photothermal processing (RPP). ZnO nanostructures were studied for the development of volatile organic compounds (VOC) sensors. The investigations results indicate that by RPP is possible to control the sensing properties and operating temperature. A correlation taking into account the nanostructure of the material, the effects of the dopants, RPP and the response of the VOC sensor was established

Keywords

II-VI semiconductors; chemical vapour deposition; gas sensors; nanostructured materials; photothermal spectroscopy; thin films; zinc compounds; VOC sensors; ZnO; ZnO nanostructures; chemical deposition technique; gas sensors; rapid photothermal processing; volatile organic compounds sensors; zinc oxide nanostructured thin films; Chemical processes; Chemical sensors; Gas detectors; Nanostructures; Sputtering; Temperature control; Temperature sensors; Thin film sensors; Volatile organic compounds; Zinc oxide; RPP; VOC; ZnO nanostructure; sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

International Semiconductor Conference, 2006

Conference_Location

Sinaia

Print_ISBN

1-4244-0109-7

Type

conf

DOI

10.1109/SMICND.2006.283968

Filename

4063195