Design of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems

In this work the effect of the squeeze film damping on MEMS structures is studied. As the simulation of the microsystems involves different physical domains, the analysis with numerical methods can turn out remarkably onerous such as when, due to technological reasons, the membrane is built with several holes. In this case the reduced order modeling is preferable. In the present work the non-linear coefficients of equivalent damping and stiffness by finite element models are investigated to be exported in a reduced order model. By means of numerical finite element calculation is studied the sensitivity analysis related to design parameters such as dimension of the plate and the presence, or lack, of holes