DocumentCode :
325827
Title :
Plasma Grown Oxides On Single Crystal And Amorphous Silicon Substrates
Author :
Zhang, J.F. ; Taylor, S. ; Eccleston, W. ; Law, M.E. ; Allsopp, D.W.E.
Author_Institution :
University of Liverpool
fYear :
1990
fDate :
32989
Firstpage :
7
Lastpage :
11
fLanguage :
English
Publisher :
iet
Conference_Titel :
Silicon Today, IEE Colloquium on
Conference_Location :
IET
Type :
conf
Filename :
696107
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=325827
