Title :
Sensors Microprocessing by Laser Direct Patterning (LDP) for Industrial Production
Author :
Ulieru, Dumitru ; Ciuciumis, Alina ; Tantau, Adrian ; Ulieru, Elena
Author_Institution :
ROMES S.A., Bucharest
Abstract :
The newly developed mask projection process, called laser direct patterning (LDP) is a process for the high volume production with conductive and reflecting sensors. Due to its simple process mechanism it combines precision and economic efficiency. Depending of material, sensors and sensor elements of thin metal films with lines and spaces 15 m are producible. The paper present the principle of laser ablation of thin metal on polymer substrate, also represented the systems engineering and described the selected applications of this technology for industrial manufacturing
Keywords :
laser ablation; metals; sensors; systems engineering; industrial production; laser ablation; laser direct patterning; polymer substrate; sensors microprocessing; thin metal; Conducting materials; Inorganic materials; Laser ablation; Optical films; Optical materials; Polymers; Production; Space technology; Systems engineering and theory; Thin film sensors; Laser Direct Patterning; polymer substrates; sensors; sensors elements;
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
DOI :
10.1109/SMICND.2006.284024
