Title :
Effect of parameters on three-beam laser interference
Author :
Miao Yu ; Chunlei Tan ; Zuobin Wang ; Le Zhao ; Wenjun Li
Author_Institution :
CNM, Changchun Univ. of Sci. & Technol., Changchun, China
Abstract :
Three-beam laser interference is used to create spot or grating patterns by three laser beams. In this paper, effect of parameters on three-beam laser interference is discussed. Computer simulation results have shown that the parameters and their deviations of incident angles, azimuthal angles and polarization states will affect the period, contrast, shape and direction of the spots of three-beam interference patterns. The patterns can be useful for the structuring of different surface patterns in three-beam laser interference lithography.
Keywords :
laser beams; light interference; light polarisation; photolithography; azimuthal angles; grating patterns; incident angles; polarization states; spot contrast; spot direction; spot period; spot shape; surface patterns; three-beam laser interference; three-beam laser interference lithography; Educational institutions; Gratings; Interference; Laser beams; Laser theory; Lithography; Shape; laser interference lithography; three-beam laser interference;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on
Conference_Location :
Suzhou
Print_ISBN :
978-1-4799-1210-0
DOI :
10.1109/3M-NANO.2013.6737381
