Title :
Movable Micromirrors - Design and Simulation
Author :
Comanescu, Florin ; Tibeica, Catalin ; Esinenco, Dorin ; Purica, Munizer
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest
Abstract :
In this paper are presented the results of the simulation for two different types of movable micromirrors on silicon-on-insulator substrate: one thermal actuated based on bimorph layer and the other electrostatic actuated. The response of the micromirrors, consisting in the displacement along z axe was investigated in static and dynamic regime using Coventor and Ansys software taking into account the material parameters and geometry of the structure. The simulation results show that the displacement of 13 mum can be obtained for micromirrors structure based on bimorph actuator with arm length of 60 mum at 80 mV applied voltage. The second structure has a displacement of 11 mum at 40 V applied voltage
Keywords :
electrostatic actuators; engineering computing; micromirrors; silicon-on-insulator; 40 V; 60 micron; 80 mV; Ansys software; Coventor; bimorph actuator; bimorph layer; electrostatic actuation; electrostatically actuation; movable micromirrors; silicon-on-insulator substrate; thermal actuation; Actuators; Adaptive optics; Gold; Micromirrors; Mirrors; Optical sensors; Silicon on insulator technology; Thermal expansion; Thermal stresses; Voltage; bimorph layer; electrostatically actuation; micromirror; thermal actuation;
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
DOI :
10.1109/SMICND.2006.284044
