DocumentCode :
3258807
Title :
Growth of porous InP: Transition from three to two dimensional structures
Author :
Zhankun Weng ; An´gang Yuan ; Weixun Mi ; Wendan Zhang ; Cuiting Wu ; Zuobin Wang
Author_Institution :
Centre for Nano Metrol. & Manuf. Technol., Changchun Univ. of Sci. & Technol., Changchun, China
fYear :
2013
fDate :
26-30 Aug. 2013
Firstpage :
393
Lastpage :
396
Abstract :
We present the transition state of porous InP from three to two dimensions, which is explored during electrochemical etching at constant current density in NaCl solutions on n-InP(100) wafers. The `node´ of the three dimensional structure revealed by scanning electron microscopy are consistent with the oscillatory periods, and that the smooth curve is corresponding to the uniformly vertical pores along with the <;001> direction. In addition, the onset and end of the oscillations shift ahead of times with increasing current densities. Furthermore, the transition of porous InP was discussed based on the surface curvature, the diffusion-control, and the reactive heat.
Keywords :
III-V semiconductors; current density; electrochemistry; etching; indium compounds; porous semiconductors; scanning electron microscopy; semiconductor growth; surface diffusion; surface structure; <;001> direction; InP; current density; diffusion-control; electrochemical etching; n-InP(100) wafers; oscillation shift; oscillatory periods; porous material; reactive heat; scanning electron microscopy; surface curvature; three-dimensional structure; transition state; Correlation; Current density; Etching; Indium phosphide; Oscillators; Scanning electron microscopy; Three-dimensional displays; Electrochemical etching; Oscillatory behavior; Porous InP; Transition;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on
Conference_Location :
Suzhou
Print_ISBN :
978-1-4799-1210-0
Type :
conf
DOI :
10.1109/3M-NANO.2013.6737393
Filename :
6737393
Link To Document :
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