DocumentCode :
3259119
Title :
A novel positioning stage with resolution enhancement functionality for nano manipulation
Author :
Chong Du ; Weihai Chen ; Xiantao Sun ; Yunjie Wu ; Jianbin Zhang ; Wenjie Chen
Author_Institution :
Sch. of Autom. Sci. & Electr. Eng., Beihang Univ., Beijing, China
fYear :
2013
fDate :
26-30 Aug. 2013
Firstpage :
170
Lastpage :
175
Abstract :
With the rapid development of nano science and precision engineering, a positioning system with high resolution is indispensable to meet the requirement of precise positioning. This paper presents the design and modeling of a flexure-based positioning stage with the functionality of resolution enhancement. To achieve high enhancement ratio, two sets of displacement reduction mechanisms are incorporated and configured serially in a monolithic symmetrical design. Following the assumption that the flexure hinge can be equivalent to an ideal revolute joint with a torsional spring, theoretical models are established to analyze the resolution enhancement ratio and dynamic performance of the positioning stage. Moreover, finite element analysis (FEA) is conducted to study the performances of the mechanism and verify the theoretical models. The results show that the proposed mechanism can achieve a resolution enhancement ratio of 18.75 to improve the positioning performance, and the first order natural frequency of the mechanism is 535.5Hz, which guarantees the bandwidth of the positioning operation.
Keywords :
finite element analysis; hinges; manipulators; position control; precision engineering; FEA; displacement reduction mechanisms; dynamic performance; finite element analysis; first order natural frequency; flexure hinge; flexure-based positioning stage; monolithic symmetrical design; nano manipulation; nano science; positioning operation; positioning system; precise positioning; precision engineering; resolution enhancement functionality; resolution enhancement ratio; torsional spring; Bandwidth; Decision support systems; Fasteners; Finite element analysis; Integrated circuits; Precision engineering; Three-dimensional displays; dynamic model; flexure hinge; precision positioning; resolution enhancement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on
Conference_Location :
Suzhou
Print_ISBN :
978-1-4799-1210-0
Type :
conf
DOI :
10.1109/3M-NANO.2013.6737407
Filename :
6737407
Link To Document :
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