Title :
Advanced substrate-independent VCSELs
Author :
Riaziat, M. ; Kyi, W. ; Xu, Yan ; Wong, P.S. ; Wasserbauer, J. ; Shih, Chih-Cheng
Author_Institution :
OEpic Semicond., Inc., Sunnyvale, CA, USA
Abstract :
We have transferred epitaxial layers between wafers and we have fabricated VCSELs on new host substrates. This procedure facilitates more advanced VCSEL designs by providing processing access to both sides of the epitaxial layers.
Keywords :
laser cavity resonators; semiconductor epitaxial layers; semiconductor lasers; surface emitting lasers; epitaxial layers; substrate-independent VCSEL design; wafers; Dielectrics; Epitaxial growth; Fabrication; Silicon; Substrates; Vertical cavity surface emitting lasers;
Conference_Titel :
Photonics Society Summer Topical Meeting Series, 2013 IEEE
Conference_Location :
Waikoloa, HI
Print_ISBN :
978-1-4673-5059-4
DOI :
10.1109/PHOSST.2013.6614443
