• DocumentCode
    3259341
  • Title

    Electrical Characteristics Of Ti-salicided N-mosfets With Asymmetric Source/drain Regions

  • Author

    Lee, Jaesung ; Kim, Kwangsoo ; Han, Jinsu ; Kim, Jaegab ; Park, Hunsub

  • fYear
    1997
  • fDate
    3-5 June 1997
  • Firstpage
    34
  • Lastpage
    36
  • Keywords
    CMOS technology; Contact resistance; Electric resistance; Electric variables; Electrical resistance measurement; Geometry; MOSFET circuits; Sputter etching; Testing; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on
  • Conference_Location
    Taipei, Taiwan
  • ISSN
    1524-766X
  • Print_ISBN
    0-7803-4131-7
  • Type

    conf

  • DOI
    10.1109/VTSA.1997.614721
  • Filename
    614721
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3259341