Title :
Self-testing of sigma-delta MEMS sensors using BIMBO
Author :
Juillard, J. ; Colinet, E.
Author_Institution :
SUPELEC, SSE, Gif-sur-Yvette
Abstract :
This paper deals with the test of sigma-delta MEMS sensors thanks to BIMBO, an identification method based on binary observations. We show how this method may be used in order to estimate the parameters of the sensing cell and of the associated analog electronics. The principle of the method and its theoretical properties are briefly presented and its pros and cons are discussed. Two approaches for the test of sigma-delta sensors are then presented and compared.
Keywords :
identification; microsensors; testing; BIMBO; analog electronics; basic identification method-binary observations; sensing cell; sigma-delta MEMS sensors testing; Accelerometers; Automatic testing; Built-in self-test; Capacitive sensors; Costs; Delta-sigma modulation; Micromechanical devices; Parameter estimation; Parasitic capacitance; Sensor phenomena and characterization;
Conference_Titel :
Circuits and Systems, 2007. NEWCAS 2007. IEEE Northeast Workshop on
Conference_Location :
Montreal, Que
Print_ISBN :
978-1-4244-1163-4
Electronic_ISBN :
978-1-4244-1164-1
DOI :
10.1109/NEWCAS.2007.4488002
