DocumentCode :
3259504
Title :
3D micro probing systems for gear measurements with nanometer-scale deviation
Author :
Ferreira, Nuno ; Metz, D. ; Dietzel, Andreas ; Buttgenbach, Stephanus ; Krah, T. ; Kniel, K. ; Hartig, F.
Author_Institution :
Inst. of Microtechnol., Tech. Univ. Braunschweig, Braunschweig, Germany
fYear :
2013
fDate :
26-30 Aug. 2013
Firstpage :
253
Lastpage :
258
Abstract :
Three-dimensional micro probing systems based on silicon force sensors allow force measurements in the range of several μN. Their high sensitivity enables tactile measurements of three-dimensional micro- and nanostructures without leaving strong traces on the probed surfaces. However, their small sizes of 6.5 mm × 6.5 mm do not allow an easy handling and can lead to a breakage of the complete system rapidly. To improve the handling and the integration of these micro probing systems a new kind of probe head and an appropriate assembling method have been developed. In order to show the performance and the high reproducibility of microprobes for their use in coordinate metrology, many measurements have been carried out with a customary gear measuring instrument on a calibrated spur gear. The results have been compared to calibration values and the deviations are in the range of maximum some 100 nm.
Keywords :
calibration; elemental semiconductors; force measurement; force sensors; gears; microassembling; microfabrication; microsensors; nanosensors; nanostructured materials; silicon; tactile sensors; 3D microprobing system; Si; assembling method; calibration; customary gear measuring instrument; force measurement; microfabrication; nanometer-scale deviation; nanostructure; silicon force sensor; spur gear measurement; tactile measurement; three-dimensional microprobing system; Calibration; Coordinate measuring machines; Force sensors; Gears; Magnetic heads; Probes; Three-dimensional displays; 3D micro probing system; flip-chip technology; micro assembly; micro gears; tactile coordinate measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on
Conference_Location :
Suzhou
Print_ISBN :
978-1-4799-1210-0
Type :
conf
DOI :
10.1109/3M-NANO.2013.6737426
Filename :
6737426
Link To Document :
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