Title :
Characterization of hot-carrier degradation in non-isolated MOSFETs using a new gate-current measurement technique
Author :
Leang, S.E. ; Chan, D.S.H. ; Chim, W.K.
Author_Institution :
Fac. of Eng., Nat. Univ. of Singapore, Singapore
fDate :
27 Nov-1 Dec 1995
Abstract :
With the continual miniaturization of MOS devices, hot-carrier degradation has become a major reliability issue. Several techniques have been developed to characterize the hot-carrier degradation in MOSFETs. Of these, the gate-current measurement and charge-pumping techniques have been shown to be particularly attractive. However, only the gate-current measurement technique can be used on non-isolated, practical devices. A new gate-current measurement technique is developed, which requires a much shorter time to obtain the Ig-Vg characteristic curves of MOSFETs as compared to the conventional floating gate technique
Keywords :
MOSFET; characteristics measurement; electric current measurement; hot carriers; semiconductor device reliability; Ig-Vg characteristic curves; gate-current measurement technique; hot-carrier degradation; nonisolated MOSFETs; reliability; Charge pumps; Current measurement; Degradation; Electrodes; Hot carriers; Integrated circuit reliability; MOSFETs; Measurement techniques; Particle measurements; Time measurement;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 1995., Proceedings of the 1995 5th International Symposium on the
Print_ISBN :
0-7803-2797-7
DOI :
10.1109/IPFA.1995.487603