Title :
Comprehensive optimization of pid-type closed-loop MEMS accelerometer system
Author :
Mingjun Ma ; Zhonghe Jin ; Shichang Hu ; Huijie Zhu ; Zhongyi Zhu ; Yidong Liu
Author_Institution :
Micro-satellite Res. Center, Zhejiang Univ., Hangzhou, China
Abstract :
The paper introduces specific ways of optimizing Proportional-Integral-Derivative (PID) type closed-loop Microelectromechanical System (MEMS) accelerometer system performance under fixed boundaries. Parameters tuning is applied to enhancing loop gain, under which configuration the tested Total Noise Equivalent Acceleration (TNEA) is around 3.2ug-√Hz @10Hz with bandwidth over 200Hz. This result is approaching this system´s performance limit.
Keywords :
accelerometers; microsensors; optimisation; three-term control; PIB-type closed loop MEMS accelerometer system; TNEA; bandwidth 200 Hz; comprehensive optimization; frequency 10 Hz; loop gain; microelectromechanical system; parameter tuning; proportional-integral-derivative; total noise equivalent acceleration; Accelerometers; Bandwidth; Capacitance; Mathematical model; Micromechanical devices; Noise; Tuning; MEMS Accelerometer; Optimization; Parameters tuning;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on
Conference_Location :
Suzhou
Print_ISBN :
978-1-4799-1210-0
DOI :
10.1109/3M-NANO.2013.6737429
