DocumentCode
3259573
Title
Comprehensive optimization of pid-type closed-loop MEMS accelerometer system
Author
Mingjun Ma ; Zhonghe Jin ; Shichang Hu ; Huijie Zhu ; Zhongyi Zhu ; Yidong Liu
Author_Institution
Micro-satellite Res. Center, Zhejiang Univ., Hangzhou, China
fYear
2013
fDate
26-30 Aug. 2013
Firstpage
269
Lastpage
272
Abstract
The paper introduces specific ways of optimizing Proportional-Integral-Derivative (PID) type closed-loop Microelectromechanical System (MEMS) accelerometer system performance under fixed boundaries. Parameters tuning is applied to enhancing loop gain, under which configuration the tested Total Noise Equivalent Acceleration (TNEA) is around 3.2ug-√Hz @10Hz with bandwidth over 200Hz. This result is approaching this system´s performance limit.
Keywords
accelerometers; microsensors; optimisation; three-term control; PIB-type closed loop MEMS accelerometer system; TNEA; bandwidth 200 Hz; comprehensive optimization; frequency 10 Hz; loop gain; microelectromechanical system; parameter tuning; proportional-integral-derivative; total noise equivalent acceleration; Accelerometers; Bandwidth; Capacitance; Mathematical model; Micromechanical devices; Noise; Tuning; MEMS Accelerometer; Optimization; Parameters tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on
Conference_Location
Suzhou
Print_ISBN
978-1-4799-1210-0
Type
conf
DOI
10.1109/3M-NANO.2013.6737429
Filename
6737429
Link To Document