Title :
Drive mode control for MEMS gyroscopes with electrostatically tunable structure
Author :
Huijie Zhu ; Zhonghe Jin ; Shichang Hu ; Wei Ma ; Yidong Liu
Author_Institution :
Micro-Satellite Res. Center, Zhejiang Univ., Hangzhou, China
Abstract :
Variable-area capacitor with tuning capability is used to control the drive mode of MEMS gyroscopes for constant-frequency oscillation. The proposed control approach tunes the drive axis natural frequency to a preselected frequency and regulates the amplitude of the drive axis vibration. The algorithm mainly implemented using a field-programmable-gate-array (FPGA) is tested on a MEMS gyroscope operating at atmospheric pressure which is of our own manufacture. First measurement results of the novel digital prototype show the amplitude variance of the detected signal of drive axis is 26ppm in an hour while the phase variance is 45ppm.
Keywords :
capacitors; drives; field programmable gate arrays; frequency control; gyroscopes; micromechanical devices; signal detection; tuning; vibration control; FPGA; MEMS gyroscopes; amplitude regulation; constant-frequency oscillation; digital prototype; drive axis natural frequency; drive axis vibration regulation; drive mode control; electrostatically tunable structure; field-programmable-gate-array; preselected frequency; signal detection; tuning capability; variable-area capacitor; Electrodes; Gyroscopes; Micromechanical devices; Springs; Tuning; Vibrations; Frequency tuning; Gyroscope; MEMS;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on
Conference_Location :
Suzhou
Print_ISBN :
978-1-4799-1210-0
DOI :
10.1109/3M-NANO.2013.6737430
