Title :
Surface analysis and application in magnetic hard disk media
Author :
Gopalakrishnan, R.
Author_Institution :
Inst. of Microelectron., Nat. Univ. of Singapore, Singapore
fDate :
27 Nov-1 Dec 1995
Abstract :
Surface Techniques (XPS, AES and SIMS) are gaining popularity in recent years as an indispensable analytical tool in providing synergistic approach to solve technological problems. To illustrate the capabilities and limitations of these techniques, a wide number of practical examples in the area of magnetic disk media are presented and discussed. These examples include: measurement of loop thickness, composition of magnetic thin films, nature and quality of interface, impurity and contamination studies at micro/macroscopic regions, failure analysis etc
Keywords :
Auger effect; X-ray photoelectron spectra; electron spectroscopy; hard discs; magnetic film stores; mass spectroscopic chemical analysis; photoelectron spectroscopy; secondary ion mass spectroscopy; AES; SIMS; XPS; contamination; failure analysis; impurity; interface; loop thickness; magnetic hard disk media; surface analysis; thin film composition; Charge carrier processes; Chemicals; Contamination; Electrons; Hard disks; Magnetic analysis; Magnetic films; Pollution measurement; Spectroscopy; Transistors;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 1995., Proceedings of the 1995 5th International Symposium on the
Print_ISBN :
0-7803-2797-7
DOI :
10.1109/IPFA.1995.487621
