Realization of high aspect ratio silicon microneedles using optimized process for bio medical applications

Silicon microneedles were fabricated extensively for bio-medical applications by using optimized process. The entire process was simulated and resultant micro structures have been analyzed and reported. Microneedle fabrication was carried out in three different etch techniques and the outputs were compared. The optimized structure was obtained by manipulating etch parameters, mask size and isotropy coefficient of etchants. The aspect ratio (AR) of the fabricated microneedles was found to be much higher than that of any other hollow microneedles reported previously. Mechanical strength and fluid flow characteristics were also calculated and the data obtained from the calculations indicated that the structures should be compatible with modern biomedical applications such as drug and gene delivery, protein and DNA injection etc.