Title :
Newton: a library-based analytical synthesis tool for RF-MEMS resonators
Author :
McCorquodale, Michael S. ; McCann, James L. ; Brown, Richard B.
Author_Institution :
Mobius Microsystems, Inc., Detroit, MI
Abstract :
Newton is a library-based CAD tool with an analytical synthesis engine which has been developed to support the direct synthesis of the physical design and an electromechanically equivalent model of RF-MEMS resonators based on process parameters and performance metrics. Newton provides accuracy comparable to finite element analysis while requiring a fraction of the computation and design time. A comparison of results from synthesis with Newton, design with FEA, and test results from fabricated devices is presented
Keywords :
CAD; electronic engineering computing; finite element analysis; micromechanical resonators; Newton synthesis tool; RF-MEMS resonators; analytical synthesis engine; finite element analysis; library-based CAD tool; Analytical models; Computational modeling; Design automation; Finite element methods; Logic devices; Measurement; Micromechanical devices; Performance analysis; Productivity; Radiofrequency microelectromechanical systems;
Conference_Titel :
Design Automation, 2006. Asia and South Pacific Conference on
Conference_Location :
Yokohama
Print_ISBN :
0-7803-9451-8
DOI :
10.1109/ASPDAC.2006.1594695
