• DocumentCode
    3261043
  • Title

    Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators on nonconventional plastic substrates

  • Author

    Yi Zou ; Hongtao Lin ; Lan Li ; Danto, Sylvain ; Musgraves, J. David ; Richardson, Kathleen ; Juejun Hu

  • Author_Institution
    Dept. of Mater. Sci. & Eng., Univ. of Delaware, Newark, DE, USA
  • fYear
    2013
  • fDate
    8-10 July 2013
  • Firstpage
    66
  • Lastpage
    67
  • Abstract
    We demonstrated thermal nanoimprint fabrication of photonic devices in chalcogenide glass films on both semiconductor and nonconventional plastic substrates. A high micro-ring intrinsic quality factor of 3 × 105 is achieved at 1550 nm wavelength.
  • Keywords
    chalcogenide glasses; nanolithography; plastics; resonators; soft lithography; substrate integrated waveguides; substrates; chalcogenide glass films; high microring intrinsic quality factor; nonconventional plastic substrates; photonic devices; semiconductor substrates; thermal nanoimprint fabrication; waveguide resonators; wavelength 1550 nm; Glass; Optical device fabrication; Optical films; Optical resonators; Optical waveguides; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Society Summer Topical Meeting Series, 2013 IEEE
  • Conference_Location
    Waikoloa, HI
  • Print_ISBN
    978-1-4673-5059-4
  • Type

    conf

  • DOI
    10.1109/PHOSST.2013.6614542
  • Filename
    6614542
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3261043