Title :
A special Silicon Micro-machined Gyroscope for Rotating Carrier
Author :
Hong-wei, Wang ; Chen-jie, Chee ; Gong-qing, Teng ; Shi-yu, Jiang
Author_Institution :
School of Science, Beijing Information science and technology university., Beijing, 100085, China. Email: drhwh@biti.edu.cn
Abstract :
A novel silicon micro-machined gyroscope which is driven by the rotating carrier´s angular velocity is introduced. The principle of structure is analyzed. The mathematic module is also established and the dynamics parameters of the gyroscope is calculated. The theories research have certificated that the principle of the gyroscope is correct.
Keywords :
Angular velocity; Capacitors; Circuits; Damping; Electrodes; Equations; Gyroscopes; Manufacturing; Silicon; Voltage; Angular velocity; Gyroscope; Micromechanics; Rotating carrier;
Conference_Titel :
Electron Devices and Semiconductor Technology, 2007. EDST 2007. Proceeding of 2007 International Workshop on
Conference_Location :
Tsinghua University
Print_ISBN :
1-4244-1098-3
Electronic_ISBN :
1-4244-1098-3
DOI :
10.1109/EDST.2007.4289789
