DocumentCode
3261549
Title
A special Silicon Micro-machined Gyroscope for Rotating Carrier
Author
Hong-wei, Wang ; Chen-jie, Chee ; Gong-qing, Teng ; Shi-yu, Jiang
Author_Institution
School of Science, Beijing Information science and technology university., Beijing, 100085, China. Email: drhwh@biti.edu.cn
fYear
2007
fDate
3-4 June 2007
Firstpage
106
Lastpage
109
Abstract
A novel silicon micro-machined gyroscope which is driven by the rotating carrier´s angular velocity is introduced. The principle of structure is analyzed. The mathematic module is also established and the dynamics parameters of the gyroscope is calculated. The theories research have certificated that the principle of the gyroscope is correct.
Keywords
Angular velocity; Capacitors; Circuits; Damping; Electrodes; Equations; Gyroscopes; Manufacturing; Silicon; Voltage; Angular velocity; Gyroscope; Micromechanics; Rotating carrier;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Semiconductor Technology, 2007. EDST 2007. Proceeding of 2007 International Workshop on
Conference_Location
Tsinghua University
Print_ISBN
1-4244-1098-3
Electronic_ISBN
1-4244-1098-3
Type
conf
DOI
10.1109/EDST.2007.4289789
Filename
4289789
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