Title :
Parasitics extraction involving 3-D conductors based on multi-layered Green´s function
Author :
Ye, Zuochang ; Yu, Zhiping
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing
Abstract :
An efficient algorithm for three-dimensional (3-D) capacitance extraction on multi-layered and lossy substrate is presented. The new algorithm represents a major improvement over the quasi-3D approach used in Green´s function-based solvers by taking into consideration of the side-wall effects of the conductors. The accuracy and efficiency of the new algorithm is tested by examples
Keywords :
Green´s function methods; capacitance measurement; conductors (electric); substrates; 3D capacitance extraction; 3D conductors; lossy substrate; multilayered Greens function; parasitic extraction; side-wall effects; Conductors; Dielectric substrates; Finite difference methods; Green´s function methods; Linear systems; Magnetic confinement; Microelectronics; Parasitic capacitance; Permittivity; Testing;
Conference_Titel :
Design Automation, 2006. Asia and South Pacific Conference on
Conference_Location :
Yokohama
Print_ISBN :
0-7803-9451-8
DOI :
10.1109/ASPDAC.2006.1594766
