Title :
A novel analysis method of threshold voltage shift due to detrap in a multi-level flash memory
Author :
Yamada, R. ; Sekiguchi, T. ; Okuyama, Y. ; Yugami, J. ; Kume, H.
Author_Institution :
Central Res. Lab., Hitachi Ltd., Tokyo, Japan
Abstract :
With the aim of improving flash-memory retention characteristics, we investigated threshold voltage shift (/spl Delta/V/sub th/) due to charge detrapping from the tunnel oxide. Accordingly, we propose a new parameter that can reveal the main origin of detrapping (hole/electron) and the detrap centroid. We found that the main origin of detrapping changes from holes to electrons depending on the degree of tunnel-oxide degradation. Since the hole detrapping increases V/sub th/ of a programmed memory cell, this V/sub th/ increase must be considered, especially when designing a multi-level flash memory.
Keywords :
carrier lifetime; electron traps; flash memories; hole traps; integrated circuit design; integrated memory circuits; tunnelling; charge detrapping; detrap; detrap centroid; detrapping; detrapping parameter; electron detrapping; flash-memory retention characteristics; hole detrapping; multi-level flash memory; multi-level flash memory design; programmed memory cell; threshold voltage shift; tunnel oxide; tunnel-oxide degradation; Charge carrier processes; Degradation; FETs; Flash memory; Laboratories; MOS capacitors; Pulse measurements; Stress measurement; Threshold voltage; Time measurement;
Conference_Titel :
VLSI Technology, 2001. Digest of Technical Papers. 2001 Symposium on
Conference_Location :
Kyoto, Japan
Print_ISBN :
4-89114-012-7
DOI :
10.1109/VLSIT.2001.934976