DocumentCode

3263756

Title

Extraction Of Locos Edge Defect Information In SOI/MOSFETs

Author

Yujun Li ; Ma, T.P.

fYear

1997

fDate

3-5 June 1997

Firstpage

123

Lastpage

127

Keywords

Charge pumps; Data mining; Doping; Isolation technology; MOSFET circuits; Microelectronics; Monitoring; Semiconductor films; Silicon; Threshold voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on

Conference_Location

Taipei, Taiwan

ISSN

1524-766X

Print_ISBN

0-7803-4131-7

Type

conf

DOI

10.1109/VTSA.1997.614742

Filename

614742