Suppression of surface waves using the micromachining technique

Author

Jung-Gwan Yook ; Katehi, L.P.B.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

2

fYear

1998

fDate

21-26 June 1998

Firstpage

652

Abstract

Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.

Keywords

antenna feeds; antenna theory; elemental semiconductors; finite element analysis; micromachining; microstrip antennas; microwave antennas; millimetre wave antennas; permittivity; silicon; 3D finite element method; Si; bandwidth; effective dielectric constant curves; higher order modes; micromachining technique; microwave antennas; millimeter-wave antennas; patch antennas design; silicon micromachining; silicon substrate material; substrate modes suppression; surface waves suppression; Bandwidth; Dielectric constant; Dielectric materials; Dielectric substrates; Micromachining; Microwave antennas; Millimeter wave technology; Patch antennas; Silicon; Surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Antennas and Propagation Society International Symposium, 1998. IEEE

Conference_Location

Atlanta, GA, USA

Print_ISBN

0-7803-4478-2

Type

conf

DOI

10.1109/APS.1998.702022

Filename

702022