Title :
Suppression of surface waves using the micromachining technique
Author :
Jung-Gwan Yook ; Katehi, L.P.B.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.
Keywords :
antenna feeds; antenna theory; elemental semiconductors; finite element analysis; micromachining; microstrip antennas; microwave antennas; millimetre wave antennas; permittivity; silicon; 3D finite element method; Si; bandwidth; effective dielectric constant curves; higher order modes; micromachining technique; microwave antennas; millimeter-wave antennas; patch antennas design; silicon micromachining; silicon substrate material; substrate modes suppression; surface waves suppression; Bandwidth; Dielectric constant; Dielectric materials; Dielectric substrates; Micromachining; Microwave antennas; Millimeter wave technology; Patch antennas; Silicon; Surface waves;
Conference_Titel :
Antennas and Propagation Society International Symposium, 1998. IEEE
Conference_Location :
Atlanta, GA, USA
Print_ISBN :
0-7803-4478-2
DOI :
10.1109/APS.1998.702022
