Control of the MBE equipment for growth of nano structures

The technique of molecular-beam-epitaxy (MBE) is the most refined for making semiconductor nanostructures. Nowadays, the growth of self-organised nano structures has been intensively investigated. This technique makes it possible the necessary special sample preparation and the in-situ observation of the nanostructures, growing in a self-organising manner. For the sample preparation and its investigation, we need very accurate control of the MBE equipment. In this paper, we present the programable logical controller (PLC) system wich steer our equipment. Here, we show the control of the heating out system of the vacuum chambers, the control of the furnace of the molecular sources and the control of the moving of the shutters.