A finite element method for determining structural displacements resulting from electrostatic forces

Author

Artz, B.E. ; Cathey, L.W.

Author_Institution

Ford Motor Co., Dearborn, MI, USA

fYear

1992

fDate

22-25 June 1992

Firstpage

190

Lastpage

193

Abstract

A finite element approach has been developed to help solve the problem of structural displacement due to forces from electrostatic attraction. The method can be applied to typical MEMS structures such as diaphragms, beams, etc. where the charge carrying surfaces can be approximated as nearly parallel. The user subroutine capability of the commercially available ABAQUS finite element code is used. This capability allows a non-uniform, position dependent, load to be applied at each integration point during the stress/displacement analysis. The load value is determined by a user written FORTRAN subroutine.<>

Keywords

deformation; displacement measurement; electrical engineering computing; electrostatics; finite element analysis; mechanical engineering computing; stress analysis; ABAQUS finite element code; FORTRAN; beams; diaphragms; electrostatic attraction; electrostatic forces; square diaphragm; stress/displacement analysis; structural displacements; suspended plate; Algorithms; Dielectric constant; Dielectrics and electrical insulation; Electrostatic analysis; Equations; Finite element methods; Micromechanical devices; Permittivity; Springs; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE

Conference_Location

Hilton Head Island, SC, USA

Print_ISBN

0-7803-0456-X

Type

conf

DOI

10.1109/SOLSEN.1992.228295

Filename

228295