Design, fabrication and testing of a miniature peristaltic membrane pump

Author

Folta, J.A. ; Raley, N.F. ; Hee, E.W.

Author_Institution

Lawrence Livermore Nat. Lab., CA, USA

fYear

1992

fDate

22-25 June 1992

Firstpage

186

Lastpage

189

Abstract

A miniaturized peristaltic membrane pump has been designed, fabricated, and tested. Sequentially bulging three membranes into a flow channel is used to provide peristaltic pumping action. The deflection response of various membrane materials to applied pressure was measured to provide specifications for the flow channel which was designed and fabricated to closely match the shape of the bulging membranes. The pump has been designed to be driven with thermopneumatic actuators. An external pneumatic system is used to actuate the membranes to allow measurement and control of the actuation pressures required to demonstrate pumping action.<>

Keywords

micromechanical devices; pneumatic control equipment; pumps; Si; actuation pressures; bulging membranes; deflection response; flow channel; integrated design; micromechanical devices; miniature peristaltic membrane pump; thermopneumatic actuators; thermopneumatic equipment; wafer; Actuators; Biomembranes; Control systems; Fabrication; Fluid flow measurement; Pneumatic systems; Pressure control; Pressure measurement; Shape measurement; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE

Conference_Location

Hilton Head Island, SC, USA

Print_ISBN

0-7803-0456-X

Type

conf

DOI

10.1109/SOLSEN.1992.228296

Filename

228296