DocumentCode
3264655
Title
A micromachined condenser hydrophone
Author
Bernstein, J.
Author_Institution
Charles Stark Draper Lab., Cambridge, MA, USA
fYear
1992
fDate
22-25 June 1992
Firstpage
161
Lastpage
165
Abstract
A micromachined, fluid-filled condenser hydrophone has been developed for underwater acoustic sensing. This device is under 1 mm in size, yet test results have demonstrated open circuit sensitivity of -206 dB ref. 1V/ mu Pa at 2 kHz, comparable to ferroelectric sensors orders of magnitude larger. The theory, fabrication and performance of the device are discussed.<>
Keywords
hydrophones; integrated circuit technology; semiconductor technology; 2 kHz; C-V characteristics; fabrication; fluid-filled condenser hydrophone; frequency sensitivity; micromachined condenser hydrophone; performance; Acoustic testing; Acoustic transducers; Capacitors; Circuit testing; Electrodes; Mechanical sensors; Sonar equipment; Springs; Underwater acoustics; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
Conference_Location
Hilton Head Island, SC, USA
Print_ISBN
0-7803-0456-X
Type
conf
DOI
10.1109/SOLSEN.1992.228301
Filename
228301
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