Title :
A micromachined condenser hydrophone
Author_Institution :
Charles Stark Draper Lab., Cambridge, MA, USA
Abstract :
A micromachined, fluid-filled condenser hydrophone has been developed for underwater acoustic sensing. This device is under 1 mm in size, yet test results have demonstrated open circuit sensitivity of -206 dB ref. 1V/ mu Pa at 2 kHz, comparable to ferroelectric sensors orders of magnitude larger. The theory, fabrication and performance of the device are discussed.<>
Keywords :
hydrophones; integrated circuit technology; semiconductor technology; 2 kHz; C-V characteristics; fabrication; fluid-filled condenser hydrophone; frequency sensitivity; micromachined condenser hydrophone; performance; Acoustic testing; Acoustic transducers; Capacitors; Circuit testing; Electrodes; Mechanical sensors; Sonar equipment; Springs; Underwater acoustics; Voltage;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
Print_ISBN :
0-7803-0456-X
DOI :
10.1109/SOLSEN.1992.228301
