Title :
Base driven micromechanical resonators
Author :
Bouwstra, S. ; Tilmans, H.A.C. ; Selvakumar, A. ; Najafi, K.
Author_Institution :
MESA Res. Unit, Twente Univ., Enschede, Netherlands
Abstract :
A novel approach for excitation and detection of micromechanical structures is presented, which makes use of base drive. Test samples for translating base drive make use of piezoelectric excitation and detection, while test samples for bending base drive make use of thermal excitation and piezoresistive detection. Both alternatives are modeled and tested.<>
Keywords :
electric sensing devices; micromechanical devices; piezoelectric transducers; resonators; micromechanical resonators; micromechanical structures; piezoelectric excitation; piezoresistive detection; thermal excitation; translating base drive; Actuators; Circuit testing; Damping; Drives; Mechanical factors; Mechanical sensors; Micromechanical devices; Piezoresistance; Shape; Vibrations;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
Print_ISBN :
0-7803-0456-X
DOI :
10.1109/SOLSEN.1992.228304
